Sensors

Our surface measurement systems
can be equipped with a wide variety of sensor types.

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Confocal white light sensors

Light consisting of different wavelengths is projected on different height levels. The spectrometer analyzes intensity vs. wavelength. A height reading is generated when the intensity of a certain wavelength reaches a maximum in the spectrometer.

available Models

MODEL

RESOLUTION

MEASUREMENT RANGE

WORKING DISTANCE

SPOT SIZE
P-CHR-100 0.003 µm

0.12 µinch

100 µm

3.9 mils

1.9 mm

0.07 inch

3.5 µm

0.14 mils

P-CHR-300 0.01 µm

0.39 µinch

300 µm

11.8 mils

4.5 mm

0.18 inch

5 µm

0.2 mils

P-CHR-350 0.012 µm

0.47 µinch

350 µm

13.8 mils

8 mm

0.31 inch

5 µm

0.2 mils

P-CHR-400 0.014 µm

0.55 µinch

400 µm

15.7 mils

15.3 mm

0.60 inch

4 µm

0.16 mils

P-CHR-600 0.02 µm

0.79 µinch

600 µm

23.6 mils

6.5 mm

0.26 inch

4 µm

0.16 mils

P-CHR-1000 0.035 µm

1.38 µinch

1000 µm

39.4 mils

20.8 mm

0.82 inch

3.5 µm

0.14 mils

P-CHR-2000 0.07 µm

2.76 µinch

2000 µm

78.7 mils

61 mm

2.40 inch

12.5 µm

0.50 mils

P-CHR-2000 0.07 µm

2.76 µinch

2000 µm

78.8 mils

13.5 mm

0.35 inch

12 µm

0.47 mils

P-CHR-3000 0.10 µm

3.94 µinch

3000 µm

118 mils

22.5 mm

0.89 inch

12 µm

0.47 mils

P-CHR-6000 0.20 µm

7.87 µinch

6000 µm

236 mils

36 mm

1.42 inch

16 µm

0.63 mils

P-CHR-8000 0.28 µm

11.02 µinch

8000 µm

315 mils

36.3 mm

1.43 inch

30 µm

1.18 mils

P-CHR-10000 0.30 µm

11.80 µinch

10 mm

0.39 inch

70 mm

2.76 inch

24 µm

0.94 mils

P-CHR-12000 0.40 µm

15.75 µinch

12 mm

0.47 inch

54 mm

2.12 inch

30 µm

1.18 mils

P-CHR-15000 0.50 µm

19.69 µinch

15 mm

0.59 inch

57 mm

2.24 inch

20 µm

0.79 mils

P-CHR-25000 0.80 µm

31.50 µinch

25 mm

0.98 inch

80 mm

3.15 inch

25 µm

0.98 mils

Interferometer

On each interface between different layers a part of the incident polychromatic light is reflected. A phase shift appears that varies with the wavelength. At certain wavelengths constructive interference occurs, at other wavelengths interference is destructive. The optical path length can be calculated from the intensity of the interference signal as a function of the wave number.

available Models
MODEL RESOLUTION MEASUREMENT RANGE WORKING DISTANCE SPOT SIZE
INT-180 (WL) 0.01 µm

0.39 µinch

3 µm – 180 µm

0.12 mils – 7.09 mils

9.5 mm

0.37 inch

10 µm

0.4 mils

IT-500 (IR) 0.14 µm

5.51 µinch

37 µm – 4700 µm

1.46 mils – 185.0 mils

39.7 mm

1.56 inch

13 µm

0.5 mils

IT-500 RW (IR) 0.17 µm

6.69 µinch

45 µm – 5600 µm

1.77 mils – 220.5 mils

39.7 mm

1.56 inch

13 µm

0.5 mils

IT-1000 (IR) 0.25 µm

9.84 µinch

64 µm – 8200 µm

2.52 mils – 322.8 mils

39.7 mm

1.56 inch

13 µm

0.5 mils

IT-1000 RW (IR) 0.22 µm

8.66 µinch

57 µm – 7300 µm

2.24 mils – 287.4 mils

39.7 mm

1.56 inch

13 µm

0.5 mils

IT 18-3000 (IR) 0.09 µm

3.54 µinch

18 µm – 3000 µm

0.71 mils – 118.1 mils

39.7 mm

1.56 inch

13 µm

0.5 mils

IT 150-15000 0.45 µm

17.72 µinch

150 µm – 15000 µm

5.91 mils – 590.6 mils

39.7 mm

1.56 inch

13 µm

0.5 mils

IT TW (IR) 0.01 µm

0.39 µinch

4 µm – 300 µm

0.16 mils – 11.81 mils

39.7 mm

1.56 inch

13 µm

0.5 mils

IT DW (IR) 0.06 µm

2.36 µinch

15 µm – 2000 µm

0.59 mils – 78.74 mils

39.7 mm

1.56 inch

13 µm

0.5 mils

3D White Light Interferometer

The reflected light from an object surface is separated into a reference beam and an object beam. The light from the reference mirror and the measured object is superposed. A camera captures the resulting interference pattern. While the objective is moved in small steps in z-direction an image is taken at each position. All images are compiled to obtain the 3D topography.

available Models

The 3D white light interferometers are available with 3 measurement ranges: 100 µm, 250µm and 400µm.

OBJECTIVE Z-RESOLUTION XY RESOLUTION FIELD OF VIEW WORKING DISTANCE
2.5X 1 nm

0.039 µinch

9.24 µm

0.36 mils

7.12 mm x 5.34 mm

0.28 inch x 0.21 inch

10.3 mm

0.41 inch

5X 1 nm

0.039 µinch

4.62 µm

0.18 mils

3.56 mm x 2.67 mm

0.14 inch x 0.11 inch

9.3 mm

0.37 inch

10X 1 nm

0.039 µinch

2.31 µm

0.09 mils

1.78 mm x 1.34 mm

0.07 inch x 0.05 inch

7.4 mm

0.29 inch

20X 0.1 nm

0.0039 µinch

1.16 µm

0.05 mils

0.89 mm x 0.66 mm

0.04 inch x 0.03 inch

4.7 mm

0.18 inch

50X 0.1 nm

0.0039 µinch

0.46 µm

18.1 µinch

0.36 mm x 0.27 mm

14.1 mils x 10.6 mils

3.4 mm

0.13 inch

100X 0.1 nm

0.0039 µinch

0.23 µm

9.06 µinch

0.18 mm x 0.13 mm

7.09 mils x 5.27 mils

2.0 mm

0.08 inch

3D Confocal Microscope

Light is focused through a spinning disk and the objective lens on the surface of the measurement. The holes on the disk serve as detecting pinholes to remove out-of-focus light. Only the surface pixel which are in focus are captured by the CCD camera. The objective lens is moved in z by a piezo drive. Each confocal image is a slice through the topography of the sample.

available Models
OBJECTIVE Z-RESOLUTION XY RESOLUTION FIELD OF VIEW WORKING DISTANCE
20X 3 nm

0.12 µinch

1.16µm

45.7 µinch

0.89 mm x 0.66 mm

0.04 inch x 0.03 inch

1.0 mm

0.04 inch

50X 2 nm

0.08 µinch

0.46 µm

18.1 µinch

0.36 mm x 0.27 mm

14.2 mils x 10.6 mils

1.0 mm

0.04 inch

100X 1 nm

0.039 µinch

0.23 µm

9.06 µinch

0.18 mm x 0.13 mm

7.09 mils x 5.12 mils

1.0 mm

0.04 inch

Questions?

We can help you finding the right measurement system for your application and budget needs.