NEWS

New dual non-contact measurement system is increasing precision and quality.

The CT 350T is a non-contact double-sided optical profilometer with a 300 mm x-, y- scanning stage. The upper sensor is mounted on a highly accurate z-axis with 100 mm range, while the lower sensor is stationary inside the granite platform. The range for thickness measurement starts at 10 µm and ends at 50 mm.

Both sensors collect height data synchronized with x-, y- encoder signals and are aligned axially in order to ensure accurate differential thickness measurements. The software generates 2D profiles and 3D maps simultaneously from the top and the bottom surface and calculates the corresponding total thickness profile or map.

The motion system uses fast and accurate magnetic linear motors. The inspection time is minimized by triggering the chromatic white light sensors at a data rate of 4 kHz. With an adapter plate on the stage aperture the system can be used as a standard optical surface profilometer which makes the CT 350T the most versatile surface and thickness measurement system. The system is also available in a smaller version as CT 250T with 200 mm travel ideally for 8” wafers or substrates and solar wafers.

To learn more about the new CT 350T or to arrange an appointment for a free test measurement please contact info@cybertechnologies.com.