CT 100

• High-speed and high-resolution 3D scanning system
• Raster sizes up 10.000 x 10.000 data points
• User friendly concept
• Sophisticated analysis and automation software

The CT 100 is a compact, high resolution non-contact profilometer. The main components of the system are a laser or a white light sensor and a x-, y-motion system on a granite platform. Especially the chromatic white light sensors combine high accuracy and high measurement speed. The sensors are available with a resolution down to 3 nm and measurement range up to 25 mm. The system can scan a maximum area of 100 mm x 100 mm. The unique cyberTECHNOLOGIES Software offers sophisticated surface metrology analysis and automated measurement routines.

Technology

• Fast and accurate magnetic linear motors
• Measurement speed: 2 kHz (4 kHz and 14 kHz optional)
• 100 mm travel in x- and y-direction, lateral resolution 0.05 µm
• 2D profiles and 3D topographical maps (topography measurement)
• Large scanning areas, up to the maximum travel of 100 mm with maximum x-, y-, z-resolution
• Laser confocal and chromatic white light sensors
• Resolution down to 3 nm, measurement range up to 25 mm
• Optional high resolution camera

Figures

Fig. 1: Coplanarity measurement of BGA components
Fig. 2: Roughness measurement on solar wafer
Fig. 3: Solid Oxid Fuel Cell (SOFC)