CT 300

• Large 300 mm x 300 mm scanning area
• Fast, precise and accurate measurement on small and large samples
• User friendly concept
• Sophisticated analysis and automation software

The CT 300 is a non-contact profilometer with a 300 mm x-, y-motion system. It can handle up 12” wafers or other large substrates and parts. It is ideal for measuring flatness with sub-micron accuracy over the complete 300 mm travel. Using a chromatic white light sensor and a data collection rate of 4 kHz the inspection time is minimized. The sensors are available with a resolution down to 3 nm and a measurement range up to 25 mm. With our multi-sensor technology several sensor heads can be mounted simultaneously.

Technology

• Fast and accurate magnetic linear motors
• Measurement speed 4kHz (14 kHz optional)
• 300 mm travel in x- and y-direction, lateral resolution 0.05 µm, optional motorized z-axis
• 2D profiles and 3D topographical maps (topography measurement)
• Large scanning areas, up to the maximum travel of 300 mm with maximum x-, y-, z-resolution
• Laser confocal and chromatic white light sensors
• Resolution down to 3 nm, measurement range up to 25 mm
• On-axis camera or high resolution off-axis camera

Figures

Fig. 1: Geometry measurement of LED devices
Fig. 2: Flatness measurement of a silicon wafer
Fig. 3: Warpage of electronic components