Sensors

Overview

 

Type	Step Height	Thickness	Volume	Flatness	Roughness	Bumps
DRS Series (Triangulation)	++++	++	+++ 1)	++++	++	+ 2)
LT Series (Laser Confocal)	++++	+++ 3)	++++	+++	+++	++++
CHR Series (Chromatic Confocal)	++++	+++ 3)	++++	+++	++++	++++
CHR Series (Interferometer)	++++ 4)	++++	+	+++ 4)	+ 4)	+ 4)

1) For low contoured features
2) Works only for low contoured bumps
3) Material depending
4) Only with internal reference

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