VANTAGE

• Large 200 mm x 200 mm scanning area
• Compact benchtop design
• User friendly concept
• Sophisticated analysis and automation software

The cyberSCAN VANTAGE is a laser based non-contact inspection system from cyberTECHNOLOGIES. It combines high resolution sensor technology with x- and y-translation stages for scanning any surface. All electronic components are integrated into the cast iron frame, no cables or external controllers are required. The software offers sophisticated surface metrology analyses and automated measurement routines.

Technology

• State-of-the art linear drives with piezo ceramic motors
• 200 mm travel in x- and y-direction, lateral resolution 0.1 µm
• 2D profiles and 3D topographical maps
• Large scanning areas, up to the maximum travel of 200 mm with maximum x-, y-, z-resolution
• Various sensors types with different working principles
• Resolution down to 0.01 µm, measurement range up to 8 mm
• Integrated on-axis camera, visible laser spot inside the camera FOV

Figures

Fig. 1: Coplanarity of BGA components
Fig. 2: 3D metallization measurement on solar cells
Fig. 3: Thick-film height on hybrid circuits