VANTAGE 50

• Cost-effective profilometer and 3D scanning solution
• Integrated motion system with 50 mm travel
• User friendly concept
• Sophisticated analysis and automation software

The cyberSCAN VANTAGE 50 is a compact, non-contact profiling system for fast scanning of any part or surface. The system combines a laser sensor, a base unit with an integrated translation stage and a PC or a laptop for data analysis. The sensor scans over the object and produces a high-resolution height profile. The confocal laser sensor can also produce a scan line with the width of 1.1 mm and a lateral resolution of 2 µm. In combination with the translation stage a highly accurate 3D raster can be recorded.

Technology

• Integrated y-stage with sensor mount
• 50 mm travel in y-direction, lateral resolution 0.05 µm
• Laser confocal or triangulation sensors
• Resolution down to 0.01 µm, measurement range up to 8 mm
• 3D Line-scan capabilities (laser confocal sensor) with 1.1 mm width and 2 µm lateral resolution
• Integrated on-axis camera, visible laser spot inside the camera field of view

Figures

Fig. 1: Depth measurement of laser scribing
Fig. 2: 3D metallization measurement on solar cells
Fig. 3: Thick-film height measurement on hybrid circuits