SCAN CT
SCAN CT is a software package for measuring and analyzing 2D profiles and 3D raster maps. It offers complete 2D and 3D surface measurement parameters as well as sophisticated filter and compensation methods.

- Complete 2D and 3D surface analysis
- Profile and 3D Roughness measurements according to DIN ISO EN standards
- Comprehensive profile and surface compensations
- Advanced filter technologies
- Uni- / bi-directional scanning
- Linear, circular and elipsodal scanning
- Simultaneous data collection of up to 5 sensors
- Dedicated user management
- Up to 200 Mio data points per raster
- Fast multi-thread technology
Features & highligths of Scan CT
2D profile measurement
- Step Height (avg., max. and min. height)
- Flatness and Warpage
- Width and Length
- Cross Section Area
- Angle, Radius, Contour Analysis

Height and Width Measurement of a solar cell finger.
Define base line and measurement areas using reference and measurement cursors. Select analysis from dropdown menu.

Profile analysis on a metal precision part.
3D COPLANARITY MEASUREMENT
- 3D Height (avg., max. and min. height)
- Flatness and Warpage
- Coplanarity

Coplanarity measurement of a BGA component
Draw rectangle, round or polygon cursors to define base plane and measurement areas.

3D surface of the BGA component
3D ROUGHNESS MEASUREMENTS
- New DIN EN ISO 25178 Parameters
- 3D Waviness Filters
- 3D Abbott-Firestone material curve, Histogram

Roughness Measurement on a solar wafer
Use advanced DIN /TS 16610 Filters. 3D Roughness Analysis even on warped or uneven surfaces.

3D Surface
PARALLEL DATA COLLECTION
- Parallel scanning with up to 4 sensors
- Collect Top, Bottom and Thickness data
- Average Thickness, Bow and Curvature
- Total Thickness Variation
- Parallel Intensity Masking

Top, bottom and thickness profile of a solar wafer
Graphical display of thickness maps and top/bottom surfaces.

Top and bottom surface of a fuel cell component
Profile roughness measurements
- DIN EN ISO conform Roughness Parameters
- Shape Removal Algorithm
- Abbott-Firestone Material Curve
- Histogram
- Tip Simulation for Non-Contact Systems

Roughness Measurement on a metal surface.
Advanced roughness analysis, even on round or angled surfaces using shape compensation. Display waviness and roughness profile.

2D Abbott-Firestone material curve, Histogram
3D VOLUME & AREA MEASUREMENTS
- Volume (Cuts, Fills, Net Volume)
- Planar area
- Surface area

Volume calculation on a thin film print
Measures cuts and fills and uses height threshold. Accurate areal and planar surface calculations.

3D Surface
2D / 3D SURFACE COMPENSATION
- 2D and 3D Polynom Fit
- Pre- and after measurements
- Areal Waviness Compensation

Copper surface defect with areal waviness filter
Surface compensation is only applied based on the data in the reference cursors.

Platinum print pre and post 3D-polynom fit
MORE FEATURES AND HIGHLIGHTS
- x-, y-, z-data stitching capability
- 2D and 3D etch detection algorithm
- 3D surface matching
- Raster up to 400,000,000 data points
- Integrated user management

Automatic detection of BGA bumps
Compare geometry by overlaying profiles.

Profiles across a fuel cell component
- Easy to use menu based software tool
- No programming skills required
- All analyses, compensations, and filters from SCAN CT
- Automatic position correction using pattern recognition (fiducials and edge alignment)
- Step and Repeat (with multilayer function)
- Definition of tolerances (UCL, LCL, UWL, LWL)
- Colored warning indications (good, bad, warning)
- Built-in SPC charts with report function (x bar / rank, position-specific)
- Flexible data saving option (automatic, manual, with user interaction)
- Stylesheets for user defined data output format
- Integrated database for templates and SPC data
- Web service for direct data transfer to CAQ system
- 2D and 3D edge detection algorithm
- 2D and 3D correlation algorithms
- Easy programming using tasks and templates (no script language)
- Virtual Tasks for user defined analysis and calculations
- Table view for multiple results
- User fields (accepts barcode, DMC, predefined list etc.)
- Traceability
- Plug-Ins for customized software solutions
- SECS/GEM
ASCAN features & highligths
AUTOMATED MEASUREMENT
- Easy to use menu based software tool
- No programming skills required
- Automated data analysis without user interference
- Ideal for use in production or laboratory

ASCAN user interface with results and data review
Multiple results per position, switch between box view and table view.

Measurement of height max and diameter of bumps
FIDUCIAL CORRECTION
- Part offset and rotation compensation
- Manual and automatic mode
- Scan definitions follow part rotation

Live video and calibrated crosshair on a hybrid circuit
STEP AND REPEAT
- Easy program setup using step and repeat
- Designer for multiple levels
- Activate / deactivate individual offsets

Step and repeat preview of a semiconductor package
VIRTUAL TASK
- Use virtual task to link existing results
- Create custom design analysis
- Easy to use mathematical editor function

Calculation of die tilt in a virtual task
USER FIELDS
- User field entries before or after program start or at defined conditions
- Accepts bar code or data matrix entries
- Automatic program search
- Filter SPC data based on user fields
- Data traceability
- Enter numeric values for calculations in virtual tasks

Quick start menu with user field entries
INTEGRATED SPC AND DATA LOGGING
- Define warning and failure limits
- Clear Good / Bad / Warning indication
- View X-bar / R SPC graphs
- Print report function with charts
- Advanced statistics

X-bar / R Chart with cp and cpk values
Flexible data output via file or web-service for easy integration into existing CAQ software.

Sample file in csv format for use in MS Excel
2D PROFILE TASK
- Define analysis and scan setting
- Save task to database and update from database
- 2D edge detection with or without template

2D task template with search areas for 2D edge detection
3D RASTER TASK
- Multiple cursor sets per scan
- 3D edge detection and correlation algorithm
- Template fiducial for easy position teach-in

3D task template with multiple cursor sets
SPECIAL SETTINGS
- Output surface maps and contours automatically
- Integrated user management
- Enter comments in SPC data

3D images of 9 positions on a solar cell
Questions?
We can help you finding the right measurement system for your application and budget needs.