Interferometer
On each interface between different layers a part of the incident polychromatic light is reflected. A phase shift appears that varies with the wavelength. At certain wavelengths constructive interference occurs, at other wavelengths interference is destructive. The optical path length can be calculated from the intensity of the interference signal as a function of the wave number.

| Model | Resolution | Measurement Range | Working Distance | Spot Size |
| CHR-250-10 | 0.01 µm 0.0004 mils |
2-250 µm 0.08- 9.8 mils |
9.5 mm 0.37 inch |
10 µm 0.39 mils |
| CHR-250-40 | 0.01 µm 0.0004 mils |
2-250 µm 0.08- 9.8 mils |
27 mm 1.06 mils |
40 µm 1.57 mils |
| CHR-250-50 | 0.01 µm 0.0004 mils |
2-250 µm 0.08- 9.8 mils |
101 mm 3.97 inch |
50 µm 1.97 mils |
| IT | 0.2 µm 0.008 mils |
40-3500 µm 1.57- 137.8 mils |
23.5 mm 0.93 inch |
13 µm 0.51 mils |



