3D White Light Interferometer

Resolution: down to 0.1 nm
Features: Interchangeable objectives / automated turret / can be combined with confocal microscope

Available Models

Magnification / Type	Vertical Resolution	Lateral  Resolution	Field of View Ø	Aperture	Working Distance
20x 0.40	0.1 nm	1.3 µm	1 mm	0.40	4.7 mm
50x 0.55	0.1 nm	0.9 µm	0.4 mm	0.55	3.4 mm
100x 0.70	0.1 nm	0.7 µm	0.2 mm	0.70	2.2 mm

High-Speed White Light Interferometer (Small Field of View)

Resolution: down to 1 nm
Features: Measurements in Milliseconds

Available Models

Magnification / Type	Vertical Resolution	Lateral  Resolution	Field of View Ø	Aperture	Working Distance
2x	3 nm	6 µm	6.5 x 6.1 mm	0.10	43.0 mm
4x	3 nm	3 µm	3.3 x 3.1 mm	0.15	42.9 mm
8x	2 nm	1.5 µm	1.6 x 1.5 mm	0.25	12.8 mm
10x	2 nm	1.2 µm	1.3 x 1.2 mm	0.30	7.4 mm
20x	1 nm	0.6 µm	0.65 x 0.61 mm	0.40	4.7 mm
50x	1 nm	0.48 µm	0.26 x 0.25 mm	0.50	3.4 mm

High-Speed White Light Interferometer (Large Field of View)

Resolution: down to 20 nm
Features: Measurements in Milliseconds / Exchangable Objectives

Available Models

Magnification / Type	Vertical Resolution (Z)	Lateral  Resolution (XY)	Field of View Ø	Aperture	Working Distance
0.5x	20 nm	24 µm	24.58 x 26.11 mm	0.033	51 mm
0.8x	20 nm	15 µm	15.36 mm x 16.32 mm	0.053	51 mm
1x	20 nm	12 µm	12.29 mm x 13.06 mm	0.067	51 mm
1.5x	20 nm	8 µm	8.19 mm x 8.70 mm	0.10	51 mm
2x	20 nm	6 µm	6.14 mm x 6.53 mm	0.13	49 mm
3x	20 nm	4 µm	4.10 mm x 4.35 mm	0.15	49 mm

Sophisticated Software

Our software is designed for effortless use of all our sensor technologies within a single system. Equipped with comfort features that make it powerful yet easy to use.

Working Principle

This advanced measurement technology offers precise distance measurements using a polychromatic light source.

Movement

The sample or objective is moved in the z-direction, creating an image stack for each pixel. 

Interferogram

Each pixel produces an interferogram (correlogram), which helps measure sample height at that position. 

Height

The maximum of the interferogram’s envelope directly corresponds to the sample’s height. 

Smoothness

For very smooth surfaces, additional phase information can be used for greater precision. 

Resolution

Phase unwrapping algorithms can enhance resolution for surfaces smaller than half the wavelength of the light source.

Examples

Other Sensors

Confocal Microscope

With a resolution down to 1 nanometer, this sensor is perfectly suited for capturing small step heights and fine features with precision.

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Chromatic Confocal

A versatile all-rounder with resolution down to 3 nanometers. For high-speed applications available in models with up to 36 million datapoints / second.

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