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Sensors

Our surface measurement systems
can be equipped with a wide variety of sensor types.

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Confocal white light sensors

Light consisting of different wavelengths is projected on different height levels. The spectrometer analyzes intensity vs. wavelength. A height reading is generated when the intensity of a certain wavelength reaches a maximum in the spectrometer.
available Models

MODEL
RESOLUTION
MEASUREMENT RANGE
WORKING DISTANCE
SPOT SIZE
P-CHR-100 0.003 µm

0.12 µinch

 100 µm

3.9 mils

 1.9 mm

0.07 inch

 3.5 µm

0.14 mils
P-CHR-300 0.01 µm

0.39 µinch

 300 µm

11.8 mils

 4.5 mm

0.18 inch

 5 µm

0.2 mils
P-CHR-350 0.012 µm

0.47 µinch

 350 µm

13.8 mils

 8 mm

0.31 inch

 5 µm

0.2 mils
P-CHR-400 0.014 µm

0.55 µinch

 400 µm

15.7 mils

 15.3 mm

0.60 inch

 4 µm

0.16 mils
P-CHR-600 0.02 µm

0.79 µinch

 600 µm

23.6 mils

 6.5 mm

0.26 inch

 4 µm

0.16 mils
P-CHR-1000 0.035 µm

1.38 µinch

 1000 µm

39.4 mils

 20.8 mm

0.82 inch

 3.5 µm

0.14 mils
P-CHR-2000 0.07 µm

2.76 µinch

 2000 µm

78.7 mils

 61 mm

2.40 inch

 12.5 µm

0.50 mils
P-CHR-2000 0.07 µm

2.76 µinch

 2000 µm

78.8 mils

 13.5 mm

0.35 inch

 12 µm

0.47 mils
P-CHR-3000 0.10 µm

3.94 µinch

 3000 µm

118 mils

 22.5 mm

0.89 inch

 12 µm

0.47 mils
P-CHR-6000 0.20 µm

7.87 µinch

 6000 µm

236 mils

 36 mm

1.42 inch

 16 µm

0.63 mils
P-CHR-8000 0.28 µm

11.02 µinch

 8000 µm

315 mils

 36.3 mm

1.43 inch

 30 µm

1.18 mils
P-CHR-10000 0.30 µm

11.80 µinch

 10 mm

0.39 inch

 70 mm

2.76 inch

 24 µm

0.94 mils
P-CHR-12000 0.40 µm

15.75 µinch

 12 mm

0.47 inch

 54 mm

2.12 inch

 30 µm

1.18 mils
P-CHR-15000 0.50 µm

19.69 µinch

 15 mm

0.59 inch

 57 mm

2.24 inch

 20 µm

0.79 mils
P-CHR-25000 0.80 µm

31.50 µinch

 25 mm

0.98 inch

 80 mm

3.15 inch

 25 µm

0.98 mils

Interferometer

On each interface between different layers a part of the incident polychromatic light is reflected. A phase shift appears that varies with the wavelength. At certain wavelengths constructive interference occurs, at other wavelengths interference is destructive. The optical path length can be calculated from the intensity of the interference signal as a function of the wave number.
available Models
MODEL RESOLUTION MEASUREMENT RANGE WORKING DISTANCE SPOT SIZE
INT-180 (WL) 0.01 µm

0.39 µinch

 3 µm – 180 µm

0.12 mils – 7.09 mils

 9.5 mm

0.37 inch

 10 µm

0.4 mils
IT-500 (IR) 0.14 µm

5.51 µinch

 37 µm – 4700 µm

1.46 mils – 185.0 mils

 39.7 mm

1.56 inch

 13 µm

0.5 mils
IT-500 RW (IR) 0.17 µm

6.69 µinch

 45 µm – 5600 µm

1.77 mils – 220.5 mils

 39.7 mm

1.56 inch

 13 µm

0.5 mils
IT-1000 (IR) 0.25 µm

9.84 µinch

 64 µm – 8200 µm

2.52 mils – 322.8 mils

 39.7 mm

1.56 inch

 13 µm

0.5 mils
IT-1000 RW (IR) 0.22 µm

8.66 µinch

 57 µm – 7300 µm

2.24 mils – 287.4 mils

 39.7 mm

1.56 inch

 13 µm

0.5 mils
IT 18-3000 (IR) 0.09 µm

3.54 µinch

 18 µm – 3000 µm

0.71 mils – 118.1 mils

 39.7 mm

1.56 inch

 13 µm

0.5 mils
IT 150-15000 0.45 µm

17.72 µinch

 150 µm – 15000 µm

5.91 mils – 590.6 mils

 39.7 mm

1.56 inch

 13 µm

0.5 mils
IT TW (IR) 0.01 µm

0.39 µinch

 4 µm – 300 µm

0.16 mils – 11.81 mils

 39.7 mm

1.56 inch

 13 µm

0.5 mils
IT DW (IR) 0.06 µm

2.36 µinch

 15 µm – 2000 µm

0.59 mils – 78.74 mils

 39.7 mm

1.56 inch

 13 µm

0.5 mils

3D White Light Interferometer

The reflected light from an object surface is separated into a reference beam and an object beam. The light from the reference mirror and the measured object is superposed. A camera captures the resulting interference pattern. While the objective is moved in small steps in z-direction an image is taken at each position. All images are compiled to obtain the 3D topography.
available Models
The 3D white light interferometers are available with 3 measurement ranges: 100 µm, 250µm and 400µm.

OBJECTIVE Z-RESOLUTION XY RESOLUTION FIELD OF VIEW WORKING DISTANCE
2.5X 1 nm

0.039 µinch

 9.24 µm

0.36 mils

 7.12 mm x 5.34 mm

0.28 inch x 0.21 inch

 10.3 mm

0.41 inch
5X 1 nm

0.039 µinch

 4.62 µm

0.18 mils

 3.56 mm x 2.67 mm

0.14 inch x 0.11 inch

 9.3 mm

0.37 inch
10X 1 nm

0.039 µinch

 2.31 µm

0.09 mils

 1.78 mm x 1.34 mm

0.07 inch x 0.05 inch

 7.4 mm

0.29 inch
20X 0.1 nm

0.0039 µinch

 1.16 µm

0.05 mils

 0.89 mm x 0.66 mm

0.04 inch x 0.03 inch

 4.7 mm

0.18 inch
50X 0.1 nm

0.0039 µinch

 0.46 µm

18.1 µinch

 0.36 mm x 0.27 mm

14.1 mils x 10.6 mils

 3.4 mm

0.13 inch
100X 0.1 nm

0.0039 µinch

 0.23 µm

9.06 µinch

 0.18 mm x 0.13 mm

7.09 mils x 5.27 mils

 2.0 mm

0.08 inch

3D Confocal Microscope

Light is focused through a spinning disk and the objective lens on the surface of the measurement. The holes on the disk serve as detecting pinholes to remove out-of-focus light. Only the surface pixel which are in focus are captured by the CCD camera. The objective lens is moved in z by a piezo drive. Each confocal image is a slice through the topography of the sample.
available Models
OBJECTIVE Z-RESOLUTION XY RESOLUTION FIELD OF VIEW WORKING DISTANCE
20X 3 nm

0.12 µinch

 1.16µm

45.7 µinch

 0.89 mm x 0.66 mm

0.04 inch x 0.03 inch

 1.0 mm

0.04 inch
50X 2 nm

0.08 µinch

 0.46 µm

18.1 µinch

 0.36 mm x 0.27 mm

14.2 mils x 10.6 mils

 1.0 mm

0.04 inch
100X 1 nm

0.039 µinch

 0.23 µm

9.06 µinch

 0.18 mm x 0.13 mm

7.09 mils x 5.12 mils

 1.0 mm

0.04 inch

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